منابع مشابه
MEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
متن کاملA High-Sensitive Pressure Sensor Using a Single-Mode Fiber Embedded Microbubble with Thin Film Characteristics
A new fiber pressure sensor is proposed and analyzed in this paper. A commercial arc fusion splicer and pressure-assisted arc discharge technology are used here to fabricate a silica hollow microbubble from a common glass tube with the characteristics of a thin film. Then the single mode fiber is embedded into the microbubble to form a fiber Fabry-Perot interferometer by measuring the reflected...
متن کاملDesign, Modeling and Optimization of a Multilayer Thin-film Pzt Diaphragm Used in Pressure Sensor
Multilayer thin-film PZT diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both sensor and actuator. A simplified model is introduced to reduce the CPU time. Dynamic characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer PZT d...
متن کاملSelf-powered thin-film motion vector sensor
Harnessing random micromeso-scale ambient energy is not only clean and sustainable, but it also enables self-powered sensors and devices to be realized. Here we report a robust and self-powered kinematic vector sensor fabricated using highly pliable organic films that can be bent to spread over curved and uneven surfaces. The device derives its operational energy from a close-proximity triboele...
متن کاملFlexible Tactile Sensor Using Polyurethane Thin Film
A novel capacitive tactile sensor using a polyurethane thin film is proposed in this paper. In previous studies, capacitive tactile sensors generally had an air gap between two electrodes in order to enhance the sensitivity. In this study, there is only polyurethane thin film and no air gap between the electrodes. The sensitivity of this sensor is higher than the previous capacitive tactile sen...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Aeronautical and Space Sciences
سال: 1986
ISSN: 0021-4663
DOI: 10.2322/jjsass1969.34.269